JOURNAL ARTICLE
MEMS Piezoresistive Pressure Sensor with Coupled Center-Mass and Silicon Square Membrane Annular Groove for Low-Pressure Sensing
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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