JOURNAL ARTICLE

MEMS Piezoresistive Pressure Sensor with Coupled Center-Mass and Silicon Square Membrane Annular Groove for Low-Pressure Sensing

Keywords:

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
23
Refs
0.70
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
© 2026 ScienceGate Book Chapters — All rights reserved.