JOURNAL ARTICLE

Inverse-Designed Silicon Nitride Arbitrary Mode Splitters for Interferometric Optical Sensors

Abstract

We demonstrate a compact, freeform silicon nitride device that splits the input fundamental mode between an output fundamental mode and a designated high-order out-put mode, specified at the design stage, for interferometric sensing applications.

Keywords:
Interferometry Silicon nitride Mode (computer interface) Beam splitter Silicon

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