Rapid Fabrication\nof High-Performance Flexible Pressure\nSensors Using Laser Pyrolysis Direct Writing

Abstract

The fabrication of flexible pressure sensors with low\ncost, high\nscalability, and easy fabrication is an essential driving force in\ndeveloping flexible electronics, especially for high-performance sensors\nthat require precise surface microstructures. However, optimizing\ncomplex fabrication processes and expensive microfabrication methods\nremains a significant challenge. In this study, we introduce a laser\npyrolysis direct writing technology that enables rapid and efficient\nfabrication of high-performance flexible pressure sensors with a micro-truncated\npyramid array. The pressure sensor demonstrates exceptional sensitivities,\nwith the values of 3132.0, 322.5, and 27.8 kPa^–1 in the pressure ranges of 0–0.5, 0.5–3.5, and 3.5–10\nkPa, respectively. Furthermore, the sensor exhibits rapid response\ntimes (loading: 22 ms, unloading: 18 ms) and exceptional reliability,\nenduring over 3000 pressure loading and unloading cycles. Moreover,\nthe pressure sensor can be easily integrated into a sensor array for\nspatial pressure distribution detection. The laser pyrolysis direct\nwriting technology introduced in this study presents a highly efficient\nand promising approach to designing and fabricating high-performance\nflexible pressure sensors utilizing micro-structured polymer substrates.