Abstract

Ga-doped\nZnO (GZO) transparent nanostructured thin films were fabricated\nvia the magnetron sputtering process, and the effect of the Ga doping\nlevel in Ga<sub><i>x</i></sub>Zn<sub>1–<i>x</i></sub>O on their thermoelectric performance was investigated. Nanostructured\ncomposite Ga<sub>0.085</sub>Zn<sub>0.915</sub>O could achieve a power\nfactor up to 1428 μW/mK<sup>2</sup> at 850 K, which is one of\nthe highest among the reported thin-film GZO and other metal oxides-based\nthermoelectrics. A corresponding thermoelectric generator module using\nGZO as n-type legs was fabricated to attain a maximum power output\nof 230 nW at Δ<i>T</i> = 138 K with an estimated power\ndensity of 19.1 mW cm<sup>–2</sup>. First-principles calculations\nwere performed to study the thermoelectric properties of GZO, showing\nthat the calculated result is perfectly consistent with the experimental\nobservation that the maximum power factor was achieved at around 8.5%\nGa doping. In addtion, 10 nanostructured gallium-doped ZnO thin-film\nlegs were fabricated for transparent thermoelectric modules. This\nwork provides an excellent example to foresee the thermoelectric nanostructured\nthin-film material property through the theoretical simulation of\nmaterials, suggesting that modeling plays a big role in designing\nand formulating high-performance thermoelectric materials.

Keywords:
Thermoelectric effect Thermoelectric generator Thermoelectric materials Seebeck coefficient Sputter deposition Nanostructure Cavity magnetron Thin film

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