JOURNAL ARTICLE

Hydrogen ion passivation of multicrystalline silicon solar cells

J.C. MullerA. BarhdadiY. AbabouP. Siffert

Year: 1987 Journal:   Springer Link (Chiba Institute of Technology)   Publisher: Chiba Institute of Technology

Abstract

It has been recognized that hydrogen can be chosen to passivate the defects present in polycrystalline materials. Technically, the best approach is to use hydrogen ion implantation at low energy (0.5 to 5 keV) by means of a Kaufman or similar type ion source in order to reduce the processing time. For our multiple beam ion source, we have determined the effective concentration profile of the introduced hydrogen, the modification of the optical properties of the implanted wafers and the conditions under which two multicrystalline materials (POLYX and SILSO) will give the greatest improvement in solar cell performance.

Keywords:
Passivation Ion implantation Polycrystalline silicon Hydrogen Wafer Ion Ion beam Silicon

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