JOURNAL ARTICLE

Single-Crystalline SrRuO<sub>3</sub> Nanomembranes:\nA Platform for Flexible Oxide Electronics

Abstract

The\nfield of oxide electronics has benefited from the wide spectrum of\nfunctionalities available to the ABO<sub>3</sub> perovskites, and\nresearchers are now employing defect engineering in single crystalline\nheterostructures to tailor properties. However, bulk oxide single\ncrystals are not conducive to many types of applications, particularly\nthose requiring mechanical flexibility. Here, we demonstrate the realization\nof an all-oxide, single-crystalline nanomembrane heterostructure.\nWith a surface-to-volume ratio of 2 × 10<sup>7</sup>, the nanomembranes\nare fully flexible and can be readily transferred to other materials\nfor handling purposes or for new materials integration schemes. Using <i>in situ</i> synchrotron X-ray scattering, we find that the nanomembranes\ncan bond to other host substrates near room temperature and demonstrate\ncoupling between surface reactivity and electromechanical properties\nin ferroelectric nanomembrane systems. The synthesis technique described\nhere represents a significant advancement in materials integration\nand provides a new platform for the development of flexible oxide\nelectronics.

Keywords:
Flexible electronics Electronics Oxide Characterization (materials science) Synchrotron Precision engineering

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