Highly\nSensitive Flexible Pressure Sensor Based on Silver Nanowires-Embedded\nPolydimethylsiloxane Electrode with Microarray Structure

Abstract

Flexible\npressure sensors have attracted increasing research interest because\nof their potential applications for wearable sensing devices. Herein,\na highly sensitive flexible pressure sensor is exhibited based on\nthe elastomeric electrodes and a microarray architecture. Polydimethylsiloxane\n(PDMS) substrate, coated with silver nanowires (AgNWs), is used as\nthe top electrode, while polyvinylidene fluoride (PVDF) as the dielectric\nlayer. Several transfer processes are applied on seeking facile strategy\nfor the preparation of the bottom electrode via embedding AgNWs into\nthe PDMS film of microarray structure. The flexible pressure sensor\nintegrates the top electrode, dielectric layer, and microarray electrode\nin a sandwich structure. It is demonstrated that such sensors possess\nthe superiorities of high sensitivity (2.94 kPa^–1), low detection limit (<3 Pa), short response time (<50 ms),\nexcellent flexibility, and long-term cycle stability. This simple\nprocess for preparing such sensors can also be easily scaled up to\nconstruct pressure sensor arrays for detecting the intensity and distribution\nof the loaded pressure. In addition, this flexible pressure sensor\nexhibits good performance even in a noncontact way, such as detecting\nvoice vibrations and air flow. Due to its superior performance, this\ndesigned flexible pressure sensor demonstrates promising potential\nin the application of electronic skins, as well as wearable healthcare\nmonitors.