JOURNAL ARTICLE

Supplementary document for Polarization dependences of laser in 4H-SiC wafer slicing - 7465172.pdf

Abstract

Supplementary Optical Morphologies of Longitudinal Damage and Lateral Crack Propagation

Keywords:
Slicing Polarization (electrochemistry) Laser Wafer Laser beams

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Topics

Silicon Carbide Semiconductor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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