JOURNAL ARTICLE
Supplementary document for Polarization dependences of laser in 4H-SiC wafer slicing - 7465172.pdf
Abstract
Supplementary Optical Morphologies of Longitudinal Damage and Lateral Crack Propagation
Keywords:
Slicing Polarization (electrochemistry) Laser Wafer Laser beams
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Topics
Silicon Carbide Semiconductor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Silicon and Solar Cell Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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