Creep and Internal Oxidation of Reaction Bonded Silicon Nitride

F. Thümmler; G. Grathwohl

doi:10.1007/978-94-009-6851-6_49

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Creep and Internal Oxidation of Reaction Bonded Silicon Nitride

F. Thümmler G. Grathwohl

Year: 1983 Pages: 547-555

DOI: 10.1007/978-94-009-6851-6_49

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Keywords:

Creep Materials science Microstructure Redistribution (election) Diffusion creep Porosity Deformation mechanism Silicon nitride Composite material Silicon Metallurgy Grain boundary

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Energetic Materials and Combustion

Physical Sciences → Engineering → Mechanics of Materials

Creep and Internal Oxidation of Reaction Bonded Silicon Nitride

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