JOURNAL ARTICLE
Numerical investigation into dynamic behavior of electrostatically-actuated circular clamped micro-plate subject to squeeze-film damping effect
Year: 2015 Journal: Microsystem Technologies Vol: 23 (2)Pages: 277-283 Publisher: Springer Science+Business Media
Keywords:
Nonlinear system Mechanics Microelectromechanical systems Boundary value problem Materials science Deflection (physics) Reynolds equation Voltage Finite element method Structural engineering Classical mechanics Reynolds number Engineering Physics
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12
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0.56
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Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
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