JOURNAL ARTICLE

Preparation and Characterization of Sol-Gel Derived Y2O3 Thin Films

G. TeoweeK. C. McCarthyF. S. McCarthyT. J. BukowskiDavid G. DavisD. R. Uhlmann

Year: 1998 Journal:   Journal of Sol-Gel Science and Technology Vol: 13 (1-3)Pages: 895-898   Publisher: Springer Science+Business Media
Keywords:
Dielectric Materials science Wafer Capacitor Platinum Thin film Dram Silicon Electrode High-κ dielectric Optoelectronics Nanotechnology Electrical engineering Voltage Chemistry

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19
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0.62
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Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Anodic Oxide Films and Nanostructures
Physical Sciences →  Materials Science →  Materials Chemistry
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