Preparation and Characterization of Sol-Gel Derived Y2O3 Thin Films

G. Teowee; K. C. McCarthy; F. S. McCarthy; T. J. Bukowski; David G. Davis; D. R. Uhlmann

doi:10.1023/a:1008671206691

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Preparation and Characterization of Sol-Gel Derived Y2O3 Thin Films

G. Teowee K. C. McCarthy F. S. McCarthy T. J. Bukowski David G. Davis D. R. Uhlmann

Year: 1998 Journal: Journal of Sol-Gel Science and Technology Vol: 13 (1-3)Pages: 895-898 Publisher: Springer Science+Business Media

DOI: 10.1023/a:1008671206691

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Keywords:

Dielectric Materials science Wafer Capacitor Platinum Thin film Dram Silicon Electrode High-κ dielectric Optoelectronics Nanotechnology Electrical engineering Voltage Chemistry

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Anodic Oxide Films and Nanostructures

Physical Sciences → Materials Science → Materials Chemistry

Preparation and Characterization of Sol-Gel Derived Y2O3 Thin Films

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