JOURNAL ARTICLE

ScAlN-based coupled BAW/SAW resonator with high frequency and high electromechanical coupling coefficient

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Topics

Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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