Symmetric Metamaterial Antenna to Improve Responsivity of CMOS-MEMS Thermoelectric Infrared Sensors

Yanpeng Su; Cheng-En Yang; Yi Chiu; Weileun Fang

doi:10.1109/transducers61432.2025.11109891

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Symmetric Metamaterial Antenna to Improve Responsivity of CMOS-MEMS Thermoelectric Infrared Sensors

Yanpeng Su Cheng-En Yang Yi Chiu Weileun Fang

Year: 2025 Pages: 1433-1436

DOI: 10.1109/transducers61432.2025.11109891

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Keywords:

Responsivity Metamaterial Microelectromechanical systems CMOS Materials science Optoelectronics Thermoelectric effect Antenna (radio) Infrared Electrical engineering Optics Physics Photodetector Engineering

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Antenna Design and Analysis

Physical Sciences → Engineering → Aerospace Engineering

Energy Harvesting in Wireless Networks

Physical Sciences → Engineering → Electrical and Electronic Engineering

Superconducting and THz Device Technology

Physical Sciences → Physics and Astronomy → Astronomy and Astrophysics

Symmetric Metamaterial Antenna to Improve Responsivity of CMOS-MEMS Thermoelectric Infrared Sensors

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