CMOS-Integrated Flexible Piezoelectric Sensor Arrays for High-Resolution Spatiotemporal Tactile Sensing

Po-Jui Ku; Michael S.-C. Lu

doi:10.1109/jsen.2025.3582903

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CMOS-Integrated Flexible Piezoelectric Sensor Arrays for High-Resolution Spatiotemporal Tactile Sensing

Po-Jui Ku Michael S.-C. Lu

Year: 2025 Journal: IEEE Sensors Journal Vol: 25 (15)Pages: 28156-28163 Publisher: IEEE Sensors Council

DOI: 10.1109/jsen.2025.3582903

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Keywords:

Tactile sensor CMOS Piezoelectricity High resolution Materials science Image resolution Optoelectronics Electronic engineering Computer science Electrical engineering Engineering Remote sensing Robot Artificial intelligence Geology

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Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Tactile and Sensory Interactions

Life Sciences → Neuroscience → Cognitive Neuroscience

Interactive and Immersive Displays

Physical Sciences → Computer Science → Human-Computer Interaction

CMOS-Integrated Flexible Piezoelectric Sensor Arrays for High-Resolution Spatiotemporal Tactile Sensing

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