Metal-organic chemical vapor deposition-grown wafer-scale hexagonal boron nitride for high-performance deep ultraviolet photodetectors

Yiwei Duo; Yang Qichao; Ziqiang Huo; Yang Jiankun; Junxi Wang; Tongbo Wei

doi:10.1117/1.jnp.19.042202

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Metal-organic chemical vapor deposition-grown wafer-scale hexagonal boron nitride for high-performance deep ultraviolet photodetectors

Yiwei Duo Yang Qichao Ziqiang Huo Yang Jiankun Junxi Wang Tongbo Wei

Year: 2025 Journal: Journal of Nanophotonics Vol: 19 (04) Publisher: SPIE

DOI: 10.1117/1.jnp.19.042202

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Keywords:

Chemical vapor deposition Materials science Ultraviolet Hexagonal boron nitride Photodetector Optoelectronics Wafer Metal Nanotechnology Graphene Metallurgy

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Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Metal-organic chemical vapor deposition-grown wafer-scale hexagonal boron nitride for high-performance deep ultraviolet photodetectors

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