Modeling the sensitivity of capacitive pressure sensors with micro-structured wavy surfaces

Han Peng; Nian Zhang; Hengxu Song; Liu Wang

doi:10.1007/s10409-024-24619-x

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Modeling the sensitivity of capacitive pressure sensors with micro-structured wavy surfaces

Han Peng Nian Zhang Hengxu Song Liu Wang

Year: 2025 Journal: Acta Mechanica Sinica Vol: 41 (5) Publisher: Springer Science+Business Media

DOI: 10.1007/s10409-024-24619-x

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Keywords:

Capacitive sensing Sensitivity (control systems) Materials science Pressure sensor Acoustics Electronic engineering Electrical engineering Physics Mechanical engineering Engineering

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Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Tactile and Sensory Interactions

Life Sciences → Neuroscience → Cognitive Neuroscience

Nanomaterials and Printing Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Modeling the sensitivity of capacitive pressure sensors with micro-structured wavy surfaces

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