MEMS Pressure Sensor for High-Temperature Applications

Q Zhao; Xingguo Xiong

doi:10.18260/1-2--53829

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MEMS Pressure Sensor for High-Temperature Applications

Q Zhao Xingguo Xiong

Year: 2025

DOI: 10.18260/1-2--53829

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Keywords:

Microelectromechanical systems Pressure sensor Temperature measurement Computer science Materials science Optoelectronics Engineering Mechanical engineering Physics Thermodynamics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

MEMS Pressure Sensor for High-Temperature Applications

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