JOURNAL ARTICLE

基于模型的光学邻近效应修正应用技术(特邀)

Keywords:
Computer science

Metrics

0
Cited By
0.00
FWCI (Field Weighted Citation Impact)
79
Refs
0.06
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Advancements in Photolithography Techniques
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Nanofabrication and Lithography Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering

Related Documents

© 2026 ScienceGate Book Chapters — All rights reserved.