Fully reconfigurable silicon photonic MEMS microring resonators for DWDM

Abstract

Reconfigurable silicon microrings have garnered significant interest for addressing challenges in artificial intelligence, the Internet of Things, and telecommunications due to their versatile capabilities. Compared to electro-optic (EO) and thermo-optic (TO) devices, emerging micro-electromechanical systems (MEMS)-based reconfigurable silicon photonic devices actuated by electrostatic forces offer near-zero static power consumption. This study proposes and implements novel designs for fully reconfigurable silicon photonic MEMS microrings for high-speed dense wavelength division multiplexing (DWDM) elastic networks. The designs include an all-pass microring with a 7 nm free spectral range (FSR) and full-FSR resonance tuning range, an add-drop microring with a 3.5 nm FSR and full-FSR tuning range, and an add-drop double-microring with a 34 nm FSR, wide-range discrete resonance tunability, and flat-top tunability. These advancements hold promise for practical applications.