Bio-inspired acoustic MEMS sensor with tunable resonance frequency

JOURNAL ARTICLE

Year: 2025 Journal: Sensors and Actuators A Physical Vol: 387 Pages: 116369-116369 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2025.116369

Keywords:

Microelectromechanical systems Acoustic sensor Acoustics Materials science Resonance (particle physics) Computer science Optoelectronics Physics

Metrics

Cited By

30.98

FWCI (Field Weighted Citation Impact)

Refs

0.99

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering