Analysis of MEMS Piezoresistive Pressure Sensor with Dual-Island Structures using Circular Silicon Diaphragm

Urva Dhoriyani; Radha Debal Goswami; Dadasikandar Kanekal; Sumit Kumar Jindal; Rajat Tiwari

doi:10.1109/gccit63234.2024.10862846

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Analysis of MEMS Piezoresistive Pressure Sensor with Dual-Island Structures using Circular Silicon Diaphragm

Urva Dhoriyani Radha Debal Goswami Dadasikandar Kanekal Sumit Kumar Jindal Rajat Tiwari

Year: 2024 Pages: 1-6

DOI: 10.1109/gccit63234.2024.10862846

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Keywords:

Microelectromechanical systems Piezoresistive effect Dual (grammatical number) Diaphragm (acoustics) Materials science Silicon Pressure sensor Optoelectronics Electronic engineering Electrical engineering Engineering Mechanical engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Fiber Optic Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Analysis of MEMS Piezoresistive Pressure Sensor with Dual-Island Structures using Circular Silicon Diaphragm

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