Flexible, Super-Stable, and Multifunctional Capacitive Pressure Sensors With Tilted Micropillar Array by Inclined Laser Ablation and Demolding

Tianlong Xu; Kaixin Li; Yihao Zhou; Dawei Zhang; Bin Sheng

doi:10.1109/jsen.2025.3533963

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Flexible, Super-Stable, and Multifunctional Capacitive Pressure Sensors With Tilted Micropillar Array by Inclined Laser Ablation and Demolding

Tianlong Xu Kaixin Li Yihao Zhou Dawei Zhang Bin Sheng

Year: 2025 Journal: IEEE Sensors Journal Vol: 25 (6)Pages: 9367-9374 Publisher: IEEE Sensors Council

DOI: 10.1109/jsen.2025.3533963

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Keywords:

Materials science Capacitive sensing Laser ablation Ablation Optoelectronics Laser Pressure sensor Optics Electrical engineering Mechanical engineering Engineering Aerospace engineering

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Gas Dynamics and Kinetic Theory

Physical Sciences → Mathematics → Applied Mathematics

Flexible, Super-Stable, and Multifunctional Capacitive Pressure Sensors With Tilted Micropillar Array by Inclined Laser Ablation and Demolding

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