Studies on Selective Deposition of SiO<sub>2</sub> by Rapid Atomic Layer Deposition

Sicong Shao; Yan Jin; Li Wang; Kun Cao; Rong Chen

doi:10.1109/icsict62049.2024.10831080

ScienceGate Book Chapters

JOURNAL ARTICLE

Studies on Selective Deposition of SiO₂ by Rapid Atomic Layer Deposition

Sicong Shao Yan Jin Li Wang Kun Cao Rong Chen

Year: 2024 Pages: 1-4

DOI: 10.1109/icsict62049.2024.10831080

Get Full-Text PDF Get Analytical Report

Keywords:

Atomic layer deposition Deposition (geology) Layer (electronics) Materials science Optoelectronics Nanotechnology Geology

Metrics

Cited By

0.00

FWCI (Field Weighted Citation Impact)

Refs

0.26

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Topics

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Copper Interconnects and Reliability

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Studies on Selective Deposition of SiO₂ by Rapid Atomic Layer Deposition

Metrics

Topics

Related Documents

Supercritical Fluid Atomic Layer Deposition: Base-Catalyzed Deposition of SiO₂

Selective Atomic Layer Deposition of TiO₂

Area Selective Atomic Layer Deposition of Ruthenium on SiO ₂ and W

Nanoporous SiO₂made by atomic layer deposition and atomic layer etching

Rapid SiO₂ Atomic Layer Deposition Using Tris(tert-pentoxy)silanol

Studies on Selective Deposition of SiO2 by Rapid Atomic Layer Deposition

Metrics

Topics

Related Documents

Supercritical Fluid Atomic Layer Deposition: Base-Catalyzed Deposition of SiO2

Selective Atomic Layer Deposition of TiO2

Area Selective Atomic Layer Deposition of Ruthenium on SiO 2 and W

Nanoporous SiO2made by atomic layer deposition and atomic layer etching

Rapid SiO2 Atomic Layer Deposition Using Tris(tert-pentoxy)silanol

Studies on Selective Deposition of SiO₂ by Rapid Atomic Layer Deposition

Supercritical Fluid Atomic Layer Deposition: Base-Catalyzed Deposition of SiO₂

Selective Atomic Layer Deposition of TiO₂

Area Selective Atomic Layer Deposition of Ruthenium on SiO ₂ and W

Nanoporous SiO₂made by atomic layer deposition and atomic layer etching

Rapid SiO₂ Atomic Layer Deposition Using Tris(tert-pentoxy)silanol