JOURNAL ARTICLE

A Resonant MEMS Pressure Sensor Utilizing Higher-Order Mode Oscillation

Keywords:
Microelectromechanical systems Oscillation (cell signaling) Pressure sensor Acoustics Mode (computer interface) Materials science Physics Optoelectronics Computer science Engineering Mechanical engineering

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FWCI (Field Weighted Citation Impact)
9
Refs
0.22
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Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
Sensor Technology and Measurement Systems
Physical Sciences →  Computer Science →  Computer Networks and Communications

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