A Resonant MEMS Pressure Sensor Utilizing Higher-Order Mode Oscillation

Wenliang Xia; Bo Xie; Yulan Lu; Junbo Wang; Deyong Chen; Jian Chen

doi:10.1109/sensors60989.2024.10785059

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A Resonant MEMS Pressure Sensor Utilizing Higher-Order Mode Oscillation

Wenliang Xia Bo Xie Yulan Lu Junbo Wang Deyong Chen Jian Chen

Year: 2024 Pages: 1-4

DOI: 10.1109/sensors60989.2024.10785059

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Keywords:

Microelectromechanical systems Oscillation (cell signaling) Pressure sensor Acoustics Mode (computer interface) Materials science Physics Optoelectronics Computer science Engineering Mechanical engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

A Resonant MEMS Pressure Sensor Utilizing Higher-Order Mode Oscillation

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