A Flexible Capacitive Pressure Sensor with Improved Sensitivity Over a Broad Pressure Range

Chunyu Lv; Siyi Wei; Ye Li; Tao Lv; Qi Li; Yang Liu; Mengying Xie

doi:10.1109/sensors60989.2024.10784769

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A Flexible Capacitive Pressure Sensor with Improved Sensitivity Over a Broad Pressure Range

Chunyu Lv Siyi Wei Ye Li Tao Lv Qi Li Yang Liu Mengying Xie

Year: 2024 Pages: 1-5

DOI: 10.1109/sensors60989.2024.10784769

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Keywords:

Capacitive sensing Pressure sensor Sensitivity (control systems) Pressure measurement Materials science Range (aeronautics) Acoustics Electrical engineering Electronic engineering Engineering Mechanical engineering Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

A Flexible Capacitive Pressure Sensor with Improved Sensitivity Over a Broad Pressure Range

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