基于改进最小二乘法的MEMS振镜模型参数辨识

JOURNAL ARTICLE

Year: 2024 Journal: Laser & Optoelectronics Progress Vol: 61 (9)Pages: 0923002-0923002

DOI: 10.3788/lop223403

Keywords:

Microelectromechanical systems Materials science Computer science Nanotechnology

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics