Fast Demodulated White-Light Interferometry-Based Measurement and Theoretical Verification of Mechanical Sensitivity of MEMS Biomimetic Microphone With Fiber-Optic Fabry-Pérot Interferometer

Dipeng Ren; Xiaonan Yang; Zhi-mei Qi

doi:10.1109/jsen.2024.3479197

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Fast Demodulated White-Light Interferometry-Based Measurement and Theoretical Verification of Mechanical Sensitivity of MEMS Biomimetic Microphone With Fiber-Optic Fabry-Pérot Interferometer

Dipeng Ren Xiaonan Yang Zhi-mei Qi

Year: 2024 Journal: IEEE Sensors Journal Vol: 24 (23)Pages: 39091-39100 Publisher: IEEE Sensors Council

DOI: 10.1109/jsen.2024.3479197

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Keywords:

Interferometry Fabry–Pérot interferometer White light interferometry Optical fiber Sensitivity (control systems) Optics Microelectromechanical systems Fiber optic sensor Microphone Materials science Acoustics Optoelectronics Physics Engineering Electronic engineering Laser

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Optical measurement and interference techniques

Physical Sciences → Computer Science → Computer Vision and Pattern Recognition

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Fiber Optic Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Fast Demodulated White-Light Interferometry-Based Measurement and Theoretical Verification of Mechanical Sensitivity of MEMS Biomimetic Microphone With Fiber-Optic Fabry-Pérot Interferometer

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