Low humidity hysteresis and fast response silicon based capacitive humidity sensor based on SiO2 supported GO film

Xinglin Yu; Xiaoyu Li; Sihan Ma; Xiaolong Deng; Wentao Li; Kun Tang; Xiang Yu; Xing Ding

doi:10.1016/j.snb.2024.136503

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Low humidity hysteresis and fast response silicon based capacitive humidity sensor based on SiO2 supported GO film

Xinglin Yu Xiaoyu Li Sihan Ma Xiaolong Deng Wentao Li Kun Tang Xiang Yu Xing Ding

Year: 2024 Journal: Sensors and Actuators B Chemical Vol: 421 Pages: 136503-136503 Publisher: Elsevier BV

DOI: 10.1016/j.snb.2024.136503

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Keywords:

Humidity Capacitive sensing Hysteresis Materials science Silicon Optoelectronics Electrical engineering Meteorology Condensed matter physics Engineering Physics

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Low humidity hysteresis and fast response silicon based capacitive humidity sensor based on SiO2 supported GO film

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