A fiber-optic Fabry-Perot pressure sensor based on HTCC

Abstract

In the aerospace, military industry and energy sectors, there is a growing demand for dynamic pressure measurement in high-temperature environments. At present, common electrical pressure sensors are difficult to meet the requirements of high temperature and high frequency response at the same time. Combining the characteristics of high temperature cofired ceramics (HTCC) and the structure of fiber optic Fabry-Perot sensor, this paper proposes a realization method of fiber optic Fabry-Perot pressure sensors based on HTCC and high-temperature sintering technology. Based on the theoretical analysis of HTCC materials, a high-temperature resistant pressure sensing film based on HTCC was designed and fabricated. The ceramic sintering process is further used to package and integrate HTCC sensor. The specific experimental results are as follows. Static pressure sensitivity is 1.80 nm/MPa. The goodness of fit linearity reached 0.9998. The resonant frequency of the sensor reaches 495.8 kHz. The survival time at high temperature of 800 °C is more than 80 h. The sensitivity to temperature is 0.0046 nm/℃. The sensor studied is suitable for dynamic pressure measurement in high temperature environment.