An Aluminum U-Shaped Electro-Thermally Actuated Microgripper: Simulation and Fabrication

JOURNAL ARTICLE

Year: 2024 Pages: 1-5

DOI: 10.1109/marss61851.2024.10612742

Keywords:

Fabrication Materials science Aluminium Optoelectronics Mechanical engineering Engineering Composite material

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Piezoelectric Actuators and Control

Physical Sciences → Engineering → Control and Systems Engineering