Toward highly sensitive, selective, and stable palladium‐based MEMS gas sensors for hydrogen energy security

Abstract

This perspective delves into the advanced technologies of highly sensitive and selective micro-electro-mechanical systems semiconductor hydrogen sensors. It explores the interplay between sensing material electrodynamics, separation material statistical mechanics, as well as chip thermodynamics, and systematically charts the evolution of multilayered, innovative integration techniques among sensing materials, separation membranes, and low-power chips, proposing viable technological pathways.