JOURNAL ARTICLE

基于频率调制与分振幅解调的广义光谱椭偏技术

邓仲勋 DENG Zhongxun权乃承 QUAN Naicheng李思远 LI Siyuan张淳民 ZHANG Chunmin

Year: 2024 Journal:   ACTA PHOTONICA SINICA Vol: 53 (4)Pages: 0430004-0430004   Publisher: Chinese Optical Society

Abstract

<p>提出了一种基于频率调制与分振幅解调的广义光谱椭仪方案,与现有时间调制型与时频混合调制型广义光谱椭偏技术相比,其不含运动部件与电控元件,可实现被测样品全部16个Mueller矩阵元素光谱的实时测量。与现有频率调制型广义光谱椭偏技术相比,其测量结果的光谱分辨率更高且降低了通道串扰产生的概率。</p>

Keywords:
Political science

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