Flexible MEMS temperature sensors based on Inkjet printing technology

Abstract

Flexible MEMS products can possess unique characteristics such as high stretchability, low modulus, easy deformation, good biocompatibility, and affordability, which have greater potential and application value than traditional sensors. In this paper, we fabricate a flexible MEMS temperature sensor based on inkjet printing technology and the new sensing material PEDOT: PSS, and design the matching external acquisition circuit. For the sensors designed in this paper, we analyze them experimentally from the perspectives of substrate, line width, temperature sensitivity, and fitting equation, respectively. The results show that the sensors designed in this paper are in good agreement and have high temperature sensitivity, and the TCR are kept around -0.6%. Meanwhile the exponential equation is the best fitting equation for the sensor in this paper, with the best fitting effect and the highest fitting stability.