Technology Platform for High Performance Mems Inertial & Vibration Sensors

Abstract

We present a technology platform dedicated to the fabrication of high-performance MEMS accelerometers, gyroscopes, and vibrations sensors for demanding applications. Key features of the platform, called Magelan, are the use of thick single crystalline silicon, a well-controlled Deep Reactive Ion Etching process (DRIE), to minimize frequency mismatch and quadrature, and hermetic wafer level package with the option of high vacuum (<10mTorr) to achieve high Q-factors. It enables the production of innovative designs from single-axis to multi-axis capacitive MEMS inertial and vibration sensor dies with high signal-to-noise ratio. It is one core element of Tronics' MEMS accelerometers and gyroscopes platform [1], offering outstanding performance for dynamic applications. The Magelan technology is offered to external customers as foundry service with the advantage of fast development cycles and limited technological risks.