Integrated Microwave Photonic Sensors Based on Microresonators

Abstract

Abstract Sensors stand as pivotal cornerstones of technology, driving progress across a spectrum of industries through their ability to precisely capture and interpret an extensive array of physical phenomena. Among these advancements, microwave photonic (MWP) sensing has emerged as a new sensing technique, elevating sensing speed and resolution for practical applications. Integrated MWP sensors exhibit unparalleled capabilities in ultra‐sensitive, label‐free nanoscale detection, offering the potential to synergize with advanced integration techniques for a compact footprint and versatile designs. This paper reviews and summarizes the development and recent advances in integrated MWP sensing, focusing on the schemes based on microresonators. The diverse array of existing schemes is systematically categorized, elucidating their operational principles and performance demonstration. Furthermore, the assistance of machine learning and deep learning in integrated MWP sensors is explored, highlighting the potential of intelligent sensing paradigms. Finally, current challenges and opportunities aimed at further advancing MWP sensors are discussed.