Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer

Zhifang Luo; Dongxiao Li; Xianhao Le; Tianyiyi He; Shuai Shao; Qiaoya Lv; Zhaojun Liu; Chengkuo Lee; Tao Wu

doi:10.1039/d3nr05684h

ScienceGate Book Chapters

JOURNAL ARTICLE

Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer

Zhifang Luo Dongxiao Li Xianhao Le Tianyiyi He Shuai Shao Qiaoya Lv Zhaojun Liu Chengkuo Lee Tao Wu

Year: 2024 Journal: Nanoscale Vol: 16 (21)Pages: 10230-10238 Publisher: Royal Society of Chemistry

DOI: 10.1039/d3nr05684h

Get Full-Text PDF Get Analytical Report

Abstract

We propose an ultra-compact AlScN Lamb Wave humidity sensor, which utilizes a suspended structure and an AlScN thin film to improve the sensing performance.

Keywords:

Materials science Humidity Lamb waves Relative humidity Optoelectronics Graphene Nitride Scandium Microelectromechanical systems Sensitivity (control systems) Oxide Layer (electronics) Composite material Nanotechnology Electronic engineering Surface wave Metallurgy Telecommunications Computer science

Metrics

Cited By

2.94

FWCI (Field Weighted Citation Impact)

Refs

0.83

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Ultra-compact and high-performance suspended aluminum scandium nitride Lamb wave humidity sensor with a graphene oxide layer

Abstract

Metrics

Citation History

Topics

Related Documents

High sensitivity flexible Lamb-wave humidity sensors with a graphene oxide sensing layer

A Humidity Sensor Based on Lamb Wave Resonator with Different Graphene Oxide Film

Intrinsically Switchable Dual‐Band Scandium‐Aluminum Nitride Lamb‐Wave Filter

Periodically Poled Lamb Wave Resonators Based on Ferroelectric Aluminum Scandium Nitride

A High-Performance Surface Acoustic Wave Humidity Sensor with Uniform Multiwrinkled Graphene Oxide Film