JOURNAL ARTICLE

Preparation and Characteristics of indium-tin-oxide (ITO)thin film

Yayan LiuGuilin HanLan WangLianyuan Liu

Year: 1983 Journal:   Chinese Journal of Applied Chemistry Vol: 0 (1)Pages: 99-102   Publisher: Science China Press

Abstract

Highly conductive and transparent thin films of indium-tin-oxide(ITO) have been prepared by a simple pyrolitic (spray) method. The conditions of preparation were described. Highly transparent (80-98% transmission) ITO films were obtained with sheet resistances of approximately 2-5Ω/口 for glass substrates and 6Ω/口 for borosilicate glass substrates.

Keywords:
Borosilicate glass Indium tin oxide Materials science Indium Transparent conducting film Thin film Tin Sheet resistance Oxide Electrical conductor Tin oxide Optoelectronics Nanotechnology Composite material Metallurgy Layer (electronics)

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Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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