BOOK-CHAPTER
Dielectric SiO2 Sol-Gel Coatings for Microelectronics
Dmitry KovalenkoV. V. VaskevichВ. Е. ГайшунSergei Khakhomov
Year: 2024 Lecture notes in networks and systems Pages: 72-80 Publisher: Springer International Publishing
Keywords:
Materials science Dielectric Chemical-mechanical planarization Scanning electron microscope Coating Microelectronics Capacitance Sol-gel Surface finish Surface roughness Composite material Silicon Polishing Optoelectronics Nanotechnology
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Topics
Surface Modification and Superhydrophobicity
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Optical Coatings and Gratings
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Photonic Crystals and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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