BOOK-CHAPTER

Dielectric SiO2 Sol-Gel Coatings for Microelectronics

Dmitry KovalenkoV. V. VaskevichВ. Е. ГайшунSergei Khakhomov

Year: 2024 Lecture notes in networks and systems Pages: 72-80   Publisher: Springer International Publishing
Keywords:
Materials science Dielectric Chemical-mechanical planarization Scanning electron microscope Coating Microelectronics Capacitance Sol-gel Surface finish Surface roughness Composite material Silicon Polishing Optoelectronics Nanotechnology

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Topics

Surface Modification and Superhydrophobicity
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Optical Coatings and Gratings
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
Photonic Crystals and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics

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