JOURNAL ARTICLE
A Comprehensive Study on the Ferroelectric HfO<sub>2</sub>-ZrO<sub>2</sub>-HfO<sub>2</sub> and ZrO<sub>2</sub>-HfO<sub>2</sub>-ZrO<sub>2</sub> Nanolaminates
Abstract
2022 International Conference on Solid State Devices and Materials ,A Comprehensive Study on the Ferroelectric HfO<sub>2</sub>-ZrO<sub>2</sub>-HfO<sub>2</sub> and ZrO<sub>2</sub>-HfO<sub>2</sub>-ZrO<sub>2</sub> Nanolaminates
Keywords:
Ferroelectricity Materials science Dielectric Optoelectronics
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Topics
Ferroelectric and Negative Capacitance Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Machine Learning in Materials Science
Physical Sciences → Materials Science → Materials Chemistry
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