Highly Sensitive Flexible Pressure Sensors with Hybrid Microstructures Similar to Volcano Sponge

Abstract

Preparing hybrid microstructures on flexible substrates is a crucial approach to achieving highly sensitive flexible pressure sensors. However, the preparation of hybrid microstructures on soft materials often faces complex, time-consuming, and costly problems, which hampers the advancement of highly sensitive flexible sensors. Herein, based on a 3D-printing template and a household microwave oven, a simple, green, and one-step microwave irradiation process using glucose porogen is applied to develop a flexible pressure sensor with a volcano-sponge-like porous dome structure based on porous polydimethylsiloxane (PDMS). Due to the easily deformable porous dome on the porous PDMS substrate, the flexible pressure sensor showcases exceptional sensitivity of 611.85 kPa^-1 in 0-1 and 50.31 kPa^-1 over a wide range of 20-80 kPa. Additionally, the sensor takes only 43 ms to respond, 123 ms to recover, and presents excellent stability (>1100 cycles). In application testing, the sensor effectively captures pulse signals, speech signals, tactile signals from a mechanical gripper, and gesture signals, demonstrating its potential applications in medical diagnosis and robotics. In conclusion, the microwave irradiation method based on template and glucose porogen provides a new way for the simple, low-cost, and green preparation of porous-surface hybrid microstructures on polymers and high-performance flexible pressure sensors.