Nanoimprinting for all-polymer electro-optic waveguide devices

Abstract

We performed the design and fabrication of polymer waveguide circuits, aiming for applications as electro-optic devices. Uniform waveguides with over one centimeter of length were fabricated by soft nanoimprint lithography. These multimode waveguides present a height of 3 µm and low surface roughness (2 nm), with a thin residual layer of 600 nm. Propagation losses at 1550 nm are estimated to be around 7 dB/cm.