Fabrication of functional arbitrary shape microstructures from transparent materials using femtosecond laser-induced selective laser etching

Agnė Butkutė

doi:10.15388/vu.thesis.504

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Fabrication of functional arbitrary shape microstructures from transparent materials using femtosecond laser-induced selective laser etching

Agnė Butkutė Agnė Butkutė

Year: 2023

DOI: 10.15388/vu.thesis.504

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Abstract

Funkcinių laisvai parenkamos architektūros mikrodarinių gamyba iš skaidrių medžiagų, panaudojant femtosekundiniu lazeriu indukuotą selektyvų ėsdinimą

Keywords:

Femtosecond Fabrication Laser Materials science Etching (microfabrication) Microstructure Optoelectronics Optics Nanotechnology Composite material Physics Medicine

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser and Thermal Forming Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Fabrication of functional arbitrary shape microstructures from transparent materials using femtosecond laser-induced selective laser etching

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