Flexible BaTiO3-PDMS Capacitive Pressure Sensor of High Sensitivity with Gradient Micro-Structure by Laser Engraving and Molding

Abstract

The significant potential of flexible sensors in various fields such as human health, soft robotics, human–machine interaction, and electronic skin has garnered considerable attention. Capacitive pressure sensor is popular given their mechanical flexibility, high sensitivity, and signal stability. Enhancing the performance of capacitive sensors can be achieved through the utilization of gradient structures and high dielectric constant media. This study introduced a novel dielectric layer, employing the BaTiO3-PDMS material with a gradient micro-cones architecture (GMCA). The capacitive sensor was constructed by incorporating a dielectric layer GMCA, which was fabricated using laser engraved acrylic (PMMA) molds and flexible copper-foil/polyimide-tape electrodes. To examine its functionality, the prepared sensor was subjected to a pressure range of 0–50 KPa. Consequently, this sensor exhibited a remarkable sensitivity of up to 1.69 KPa−1 within the pressure range of 0–50 KPa, while maintaining high pressure-resolution across the entire pressure spectrum. Additionally, the pressure sensor demonstrated a rapid response time of 50 ms, low hysteresis of 0.81%, recovery time of 160 ms, and excellent cycling stability over 1000 cycles. The findings indicated that the GMCA pressure sensor, which utilized a gradient structure and BaTiO3-PDMS material, exhibited notable sensitivity and a broad linear pressure range. These results underscore the adaptability and viability of this technology, thereby facilitating enhanced flexibility in pressure sensors and fostering advancements in laser manufacturing and flexible devices for a wider array of potential applications.