Atomic-layer-deposited BOx/Al2O3 stack for crystalline silicon surface passivation

Xinyu Wang; Kun Gao; Dacheng Xu; Kun Li; Chunfang Xing; Xinliang Lou; Zhaojun Su; Xinbo Yang

doi:10.1016/j.solmat.2023.112481

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Atomic-layer-deposited BOx/Al2O3 stack for crystalline silicon surface passivation

Xinyu Wang Kun Gao Dacheng Xu Kun Li Chunfang Xing Xinliang Lou Zhaojun Su Xinbo Yang

Year: 2023 Journal: Solar Energy Materials and Solar Cells Vol: 260 Pages: 112481-112481 Publisher: Elsevier BV

DOI: 10.1016/j.solmat.2023.112481

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Keywords:

Passivation Materials science Annealing (glass) Wafer Stack (abstract data type) Dopant Optoelectronics Silicon Layer (electronics) Doping Nanotechnology Metallurgy

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Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Integrated Circuits and Semiconductor Failure Analysis

Physical Sciences → Engineering → Electrical and Electronic Engineering

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Atomic-layer-deposited BOx/Al2O3 stack for crystalline silicon surface passivation

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