High-density lithium niobate integrated photonics

Abstract

We demonstrate a strip waveguide-based LiNbO 3 photonic integrated circuit fabricated with a novel hard mask, diamond-like-carbon (DLC). The steep sidewall configuration exhibits tight optical confinement and dispersion control while preserving ultra-low loss of < 4 dB/m. In the meantime, a low noise self-injection locked laser is achieved with our chips.