Inertial Sensors Development and Applications

Abstract

Faced with the broad application prospects of MEMS inertial sensors, and in response to the current demand for sensor miniaturization, high precision and high reliability, this paper proposes a small-sized, multi-redundant three-dimensional assembly structure design based on MEMS inertial sensors, and adopts Algorithm design is carried out in the real scene, and the temperature drift and installation error of the inertial sensor are compensated. The sensor obtains information through a three-axis gyroscope and a three-axis accelerometer, and the central processing unit performs data collection, signal integration, compensation and data output, and uses algorithms such as error compensation and installation error correction in the data processing process to improve the performance of the inertial sensor. From simulation experiments, the accuracy of the inertial sensor is 0.02 degree, which verifies the feasibility of the algorithm and meets the requirements for high precision and high stability of the inertial sensor. It provides a basis for realizing the requirements of future equipment for functional integration, intelligence and light weight.