Highly Sensitive and Selective Hydrogen Gas Sensor with Humidity Tolerance Using Pd-Capped SnO2 Thin Films of Various Thicknesses

Abstract

Detecting and identifying hydrogen gas leakage before a potential disaster is a critical safety concern. To address this issue, a low-cost and simple-design sensor is required with high response and fast sensing time, capable of detecting hydrogen gas even at low concentrations of 5–500 ppm. This study investigates the use of magnetron-sputtered SnO2 thin films with palladium as a catalytic layer to achieve better sensing output. The developed Pd-caped SnO2 thin film sensors showed increased sensitivity with increasing thickness, up to 246.1 nm at an operating temperature of 250 °C. The sensor with a thickness of 246.1 nm exhibited excellent selectivity for H2 gas, even in humid conditions, and was able to distinguish it from other gases such as CO, NH3, and NO2. The sensor demonstrated high response (99%) with a response/recovery time of 58 s/35 s for (5–500 ppm) hydrogen gas. The sensor showed linear response to H2 gas concentration variation (5–500 ppm) at 250 °C. The sensor was found to be mechanically stable even after 60 days in a high-humidity environment. The LOD of sensor was 151.6 ppb, making it a suitable candidate for applied sensing applications. The Pd-caped SnO2 thin film sensor with thickness of ~245 nm could potentially improve the safety of hydrogen gas handling.