Fiber-optic Fabry–Perot acceleration and vibration sensor made by MEMS technology

Abstract

The paper presents the implementation of a fiber-optic Fabry-Perot accelerometer, completely made of silica glass using glueless technology. A design of an elastic MEMS element with acceleration sensitivity of 130 nm/g is proposed, which is confirmed by numerical and experimental studies. According to the simulation results, the frequency of the first form of natural oscillations of the vibration- sensing element was determined, which is equal to 1470 Hz. The sensor was tested in the frequency range of external inertial influences from 20 to 1020 Hz.