Macromodel Simulation Of Piezoelectric Energy Harvesting With Frequency Up-Conversion Device

Abstract

A Finite element method (FEM) and macro-model simulation of piezoelectric energy harvesting with poly silicon material instead of a Cu electrode for frequency up–conversion device is studied in this paper. The macro-model simulation is performed using Intellisuit MEMS CAD tool. To perform the macro-model simulation, a straight piezoelectric cantilever frequency up-conversion model is used. It consists of straight piezoelectric cantilever (SPC) and S-shaped stainless-steel cantilever (SSC). The SSC is made up of two entity layer namely Cu Bulk General and PZT and SPC is made up of three entity layers namely Nickel Proof Mass, Stainless Steel, Cu General and design works on the frequency up-conversion mechanism. We have studied a poly silicon material instead of a Cu electrode, as one of the layer in SPC. Three types of simulations were carried out: i.e. finite element approach, macro-model simulation, and synple simulation.