JOURNAL ARTICLE
Development of Thin Film Fabrication Using Magnetron Sputtering
Year: 2023 Journal: Metals Vol: 13 (5)Pages: 963-963 Publisher: Multidisciplinary Digital Publishing Institute
Abstract
Due to their versatility, thin metal films are being used in many modern technologies, such as optoelectronics, microelectronics, catalysis, energy conversion and storage, sensors, actuators, and food packaging [...]
Keywords:
Microelectronics Fabrication Thin film Materials science Sputter deposition Nanotechnology Sputtering Optoelectronics Engineering physics Engineering
Metrics
4
Cited By
0.64
FWCI (Field Weighted Citation Impact)
12
Refs
0.58
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Advanced Sensor and Energy Harvesting Materials
Physical Sciences → Engineering → Biomedical Engineering
Nanomaterials and Printing Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
ZnO doping and properties
Physical Sciences → Materials Science → Materials Chemistry
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